Experimental polysilicon thin film coating machine

Name: JYDC series Coating Machine

Introduction: JYDC seriesCoating Machine is Our company refers to the overseas vanguard technology, the newest development's one physical vapor phase deposition (PVD) vacuum coating equipment, may simultaneously install two to four kind of different fine metal or the alloy target materials, carries on the monolayer or the multi-layer (nanometer) the membrane plates the system. Is suitable plates the coating request in each kind of tool, like the cutting tool, the drill bit, flushes traces has and so on. Through to the work piece surface in aspect and so on physics, chemistry, machinery, color modifications, achieves wear-resisting, ultra hard, the self lubrication effect.

Main Features:

1.    Uses the response gas plasma source auxiliary deposition, carries on the pre-clean and coating's auxiliary deposition to the work piece;

2.    Uses the high efficiency the pulse bias power source, causes the work piece and the film obtains a better binding force;

3.    Uses the multi-wrap twin target and the arc, may simultaneously install 2-4 kind of different fine metal or the alloy target materials, obtains compound nanometer coating;

4.    The work rest uses male, the rotation structure, good bearing power and thermostable, and is transportable the housing, facilitates the loading and unloading quite heavy mold.

5.    Touch-screen +PLC, may realize the completely automatic control, automatic/manual momentarily cuts;

Main Configuration:

1.    Vacuum chamber is vertical one open door , 304 stainless steel manufactures, vacuum chamber internal diameter from φ1000mm-Φ1300mm;

2.    Vacuum system by Rotary vane pump, Roots pump and Oil Diffusion Pumps or Molecular Pump Constitution;

3.    Coating system uses 1-2 intermediate frequency magnetism to control the sputtering power source, has 1-2 pair of non-balanced magnetism to control the target, and has 6-14 hot cathode electric arcs;

4.    High efficiency pulse bias power source;

5.    The gasification system uses domestically produced or the import gaseous mass flowmeter, the gas flow amount control (demonstration) meter;

6.    The electrically controlled system establishment electric circuit overloaded, cuts off the water supply, dies the acousto-optics alarm device;

7.    Control system (touch-screen +PLC), real time display detailed parameter, completely automatic control entire production process, and automatic memory technological parameter

Technical Parameters: