Multi-Channel Gas Control System for CVD / PECVD tube Furnaces with Precision Mass Flow Meters (MFC) and Valves

Function

Two Channels

Three Channels

Four Channels

Mass Flow Controller

Voltage: 185~245V 50/60Hz

Max. Output Power: 18W

Working Temperature: 5~45 ºC

Max. Pressure: 3x106 Pa

Accuracy: ±1% FS

Controlling Range:

Controller : 1~500 SCCM

Voltage: 185~245V 50/60Hz

Max. Output Power: 18W

Working Temperature: 5~45 ºC

Max. Pressure: 3x106 Pa

Accuracy: ±1% FS

Controlling Range:

Controller : 0~500 SCCM

Voltage: 185~245V 50/60Hz

Max. Output Power: 18W

Working Temperature: 5~45 ºC

Max. Pressure: 3x106 Pa

Accuracy: ±1% FS

Controlling Range:

Controller : 0~500sccm

Removabiligy

4 heavy duty wheels included 

Max load: 500 Lbs

Mechanical 

Pressure Gauge

Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)

Needle Valve

316 Stainless Steel 

Pipe fitting

Pipe fitting: 1/4" stainless steel

12'' length 1/4" ID Nylon pipe for immediate use

Gas mixing tank

Φ80X120mm

Stop valve

316 stainless steel needle valve, Φ1/4” 

Dimension

600x600x650 mm

Compliance

CE certified 

Warranty

One year limited with lifetime support