1200C sliding solar RTP tube furnace for graphene in lab ALD & PECVD Combination Tube Furnace System

Furnace Structure

Double layer steel structure with dual air cooling fans

 One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side

Vacuum flanges and a digital vacuum gauge are installed  for immediate use.

Sliding rail length is about 1200mm, the furnace can slide 600 mm distance

Power

2.5KW

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating& Cooling Rates

Heating Zone Length

440mm ( single zone )

Constant Temperature Zone

120mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  OD: 3.2" x  ID: 3.0" x Length: 55" (inch)   or  OD:  80 x ID 75 x Length 1400  ( mm)

Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring

Temperature Controller

PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

Built-in over temperature alarm and protection allows for operation without attendant.

Two K type thermal couples are included.  One is bilt in furnace to control furnace temperature, and another inserted into tube to monitor sample real temperature profile.

One NIST certified thermometer is included to connect to the thermal couple inside tube. the meter has RS232 Interface with Windows Software which can record temperature profile by PC.

Temperature Accuracy

+/ - 1°C

Vacuum Flanges

Stainless steel vacuum flanges are installed on both ends of tube with heavy duty support.

Right flange:  KF-25 pump connector and needle valve.

Left flange: one needle valve and 1/4" thermocouple feed-through and digital vacuum gauge.

An 24" length x 1/4" dia. K type thermocouple (included) connected to an Omega temperature calibrator (included) will be inserted through this flange to monitor the heating and cooling rates of the sample's position during furnace sliding.

Vacuum Level

10E-5 torr can be reached by molecular pump

10E-2 torr by mechanical pump.

Sliding Rails / Table

Double sliding rail made by Cr plated steel

Sliding length: 1200 mm

 Dimensions

 550 x 380 x 520  mm ( furnace only)

1500 x 380 x 620 mm ( furnace + sliding )

Warranty

One year limited manufacturer's warranty

Compliance

CE Certified