Home > Products > Vacuum multi-arc ion coating equipment > Vacuum Multiple Arc Magnetron Sputtering Compound Ion Coating Machine
Vacuum Multiple Arc Magnetron Sputtering Compound Ion Coating Machine
- 3 Set / Sets per Month
- Qingdao
- T/T
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Product Details
Condition: | New | Place of Origin: | Shandong, China | Brand Name: | UBU |
Model Number: | LZ-1100 | Voltage: | 380V | Power(W): | 50KW |
Dimension(L*W*H): | 5x3x2M | Weight: | 5T | Certification: | ISO 9001 , CE |
Warranty: | 12 months | After-sales Service Provided: | Engineers available to service machinery overseas |
Product Description
Vacuum Multiple Arc Magnetron Sputtering Compound Ion Coating Machine
Vacuum multiple arc magnetron sputtering compound ion coating machine is mainly used for the coating system to
a variety of metal film also can coat multilayer ,alloy film and chemicals, such as plating super hard wear-resistant
film, anti-corrosion coating decorative film (gold, silver, black, red, blue, green and other colors), combined with
magnetron sputtering coated multilayer films can be deposited on stainless steel, aluminum, titanium, tungsten and
other metal films, but also can be coated film of TiN ,TiC, TiCN, TiAlN, CrN, the CU, AU, the diamond film
(DLC), the decorative film ,non-metallic also it’s compounds film and multilayer. Applies to hardware, glass
handicrafts, ceramic product, etc, such as watches, mobile phones metal cover, sanitary ware, mold, electronic
products, crystal glass, eyeglass frame, tableware, knives and so on. In recent years, electric arc ion plating
technology has been greatly developed, from the original single arc source to the column arc, large flat arc,etc. But
also makes the equipment applicable widely combined with the technology of frequency magnetron sputtering, for
example, the application of hard coatings, more smooth and well decorative coating applications.
Vacuum Multiple Arc Magnetron Sputtering Compound Ion Coating Machine | |||
Model | Type | Power | Product Description |
LZ-1100 | Φ 1000× H1200mm | 50KW | Vacuum chamber use superior stainless steel material and adopts vertical front door structure, rear air exhaust system and double-layer water cooling chamber, arc coated with a combination of magnetron sputtering coating method. |
LZ-1250 | Φ 1250× H1350mm
| 60KW | The vacuum obtain system of the machine composed of diffusion vacuum pump, Roots vacuum pumps, mechanical vacuum pumps . Coating situation can be observed through the observation window, according to different process requirements, using magnetron sputtering device or multi- arc ion device to coat the products that mounted on the planetary rotation and revolution rack. Meanwhile,when the vacuum chamber start to extract the vacuum, opening the heating device, heating the vacuum chamber, the heating temperature can be set according to the product of different processes. |
LZ-1500 Cylindrical magnetron target | Φ 1500× H1200mm | 65KW | The machine adopts the cylindrical magnetron target, the magnetron target number can be selected according to the different coating process and customer needs, the workpiece transfer frame and rotational mode adopt planetary rotation and revolution, parts baking temperature from room temperature to 450°C controllable and adjustable (PID temperature control. |
LZ-1600 Cylindrical magnetron target | Φ 1600× H1200mm | 70KW | The machine adopts the cylindrical magnetron target, the magnetron target number can be selected according to the different coating process and customer needs, can coat decorative film (TiN,TiC,ZrN,TiAlN, CrN,etc), the metal film, the reaction film. |
Power Supply Type | Pulse Bias Power Supply, Direct Current magnetron power Supply, Medium Frequency Magnetron Power Supply, Arc power | ||
Ultimate Vacuum | 8×10-4 Pa | ||
Pump-out Time | From air to 5.0×10-3Pa≤20min (no-load) | ||
Rotating Stand and Rotating Style | 6 axis/8 axis/9 axis planetary autorotation and frequency conversion speed regulation (controlled and adjustable) | ||
Control mode | Automatic and Manual operation modes integrated, touch screen,PLC or computer control. | ||
Remark | Designed flexible and select the appropriate equipment according to demanders’requirements . (The range of vacuum chamber Φ 0.5-3m, H: 0.5-3m). |
Wooden case
Services:
Warranty: 12months
Installation: Engineers available to service machinery by go to customers' country.
Reception of visitors: Customers can come to our factory to study and operate with free accommodation.
Diffusion pump, rotary vane pump, roots pump, holding pump, pulse magnetron sputtering
power, unipolar pulse power, frequency magnetron power, DC magnetron power, vacuum
gauge, flange.
1 Vacuum coating equipment should be installed in the ventilation and clean place. Equipment from around the walls or other objects not
less than 500 mm, in order to inspection on equipment conveniently daily.
2 Installation site should be equipped with clean water, compressed air supply and stable voltage of 380V three phase four wire system.
3 Vacuum chamber, diffusion pump, roots pump, rotary vane pumps and maintain pump should be installed, In the case of conditional
rotary vane pumps and maintain pump should be installed anchor bolt to prevent the pump from vibrating and displacing in the work.
4 Electrical appliances before the installation must check whether there is any damage on electrical parts, at the same time with high-
pressure wind net electrical components and control cabinet for long-distance transportation process of surface dust.
5 When installation, must check whether all piping valves and seals complete and clean.
6 Before the installation need to check the connection bolts, ear, ground wire, instrument connection and button whether or not loose.
7 Check whether the electric protector is transferred to the scope of protection.
8 Tracheal joint and mouth must be strong, can’t have leakage phenomenon, airway parallel to dredge,can’t cross,boot load parts,
redundant trimmed.
9 Water installation should be tidy, can’t have leakage phenomenon, need to test the water pipe pressure if qualified.
10 All the parts after the installation, need to check one or two times, especially the bolt fasteners and electrical appliances parts, but also
need to check many times repeatedly, confirmed rear can commissioning.
1 Power on
A. Check the power supply that came with the device (air compressors, cooling towers etc.) ensure that these devices to work properly.
B. Open the total power of master cabinet, cabinet bias, arc control cabinet.
2 Vacuumize. Preheating first, open maintaining pump, then open an electric furnace, preheating time more than 1–1.5 hours, open the
mechanical pump, open roughing valve (V1 valve) after 5 seconds, when the vacuum degree is less than 6.0×102Pa, open roots pump,
when the vacuum degree is less than 2.0×100Pa, close the roughing valve (V1 valve) and open the front valve (V2 valve), followed by the
opening of high valve (V3 valve), when the degree of vacuum coating process requirements can be done.
3 Coating. First glow and then help the bombers, bombed and then coated. (Depending on the coating process)
4 Released. Turn off the high valve, a minute later turn off the front valve, shut roots pumps and mechanical pumps, open the gas valve to
deflate .
5 Shut down. First pumping a certain vacuum, then turn off the electric stove, after an hour shut off the holding pump and then shut down
the power which comes with the device.
1 Whether the circulating water in water tower keeps clean, which needs change timely according to the specific conditions.
2 Whether the circulating water channel is unimpeded.
3 Whether the pressure in cooling water tower and air compressor is normal(standard: water pressure≥0.4mpa, air pressure≥0.8mpa).
4 Whether the water pipe and air pipe has leakage condition.
5 Whether the air compressor and water pump operate normally.
6 Whether all the valves operate normally.
7 Whether the oil mass in mechanical pump, roots pump, diffusion pump and molecular pump is within the normal level, which needs
change in time according to the specific consumption.
8 Whether all target energies operate normally, which needs to change in time according to the specific consumption
9 Whether all Intermediate frequency targets, DC targets and evaporation source glow have the short circuit condition.
10 Whether the grid bias power supply, intermediate frequency power supply, multiple arc ion power supply, magnetic sputtering DC
power supply and molecular pump power supply operate normally
11 Whether the equipment’s heating is normal.
12 Whether all the switches and indicator lights on the control panel operate normally.
13 Whether the equipment’s eakproofness and pressure keeping condition is normal.
14 Whether the pressure of Argon gas, Nitrogen gas, Oxygen gas and Acetylene is normal without air leakage.
15 Whether the rotating shelves operate normally.
16 Whether the equipment’s inner lining board changed timely and whether the equipment’s appearance keeps clean.
Tel: 0086 13335014492
Email:
Skype: favian.liu
QQ: 1076127090
Wechat: 13335014492
Contact Us
- Qingdao UBU Vacuum Equipments Corp., Ltd.
- Contact nameAllen Li
- Phone86 -532 -58672659
- AddressXiaochengzhichun, Heilongjiang Road North, Chengyang Qingdao,Shandong
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