5kW Microwave Plasma CVD System

Specifications

5kW microwave plasma CVD system, microwave power source adopts the modular control, and PLC touch screen panel operation. Its

GMPS-2050CB 5kW Cylindrical Chamber

Microwave Plasma CVD System

1) Microwave Power Source and Waveguide System

   Operation frequency:             2450±50MHz

Output power:                   0.5 ~ 5kW continuously adjustable

Power stability:                 <±1% (at the rated power level)

Waveguide interface:            WR340 with FD-26 standard flange

Input power:                   380V±10% three phase, four wire

Cooling water:               6L/min

System VSWR:               VSWR ≤ 1.5

The pin stub tuner function: Load VSWR within a range of 1.5 to 30 can be interactive real-time tracking adjustment, VSWR is maintained at the set value.

2) Microwave reactor and mode convertor

  The size of chamber body and mode convertor:   φ180mm×350mm(H)

Internal size of chamber:                     φ144mm×150mm(H)
Operating mode:                           TM012 or TM013 mode

3) Vacuum system: 600L/min molecular pump,one unit; 4L/min mechanical pump, two units. background limit vacuum, better than 7×10-4Pa
4) Gas system:   Four groups gas flow system

5) Sample supporter system: Substrate diameter φ100mm, distance of axial adjustment 0-80 mm