VTC-16-3HD-LD 3 Rotary Target Plasma Sputtering Coater w. Substrate Heater (500 degree) Including 3 Targets

Input Power

• standard configuration: 220V AC, 50/ 60Hz, 700Watts (including vacuum pump)
• For using 110V AC, we will include a transformer for you. Please select the voltage in the optional bar. 

Output Power

• 1600VDC
• 40mA max.

Specimen Chamber Size

• High Purity quartz tube with flat O-ring as chamber
• 150 mm I.D. Dia x 150mm Height

Heating sample stage with heater

• One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.
• The substrate heater is built in the stage with a maximum heating temperature of 500°C
• PID temperature controller with +/-1°C accuracy is built in touch screen control panel 
•  One needle valve installed to allow Ar gas inlet to achieve better plasma coating

Control Panel

• 6" color  touch-screen control panel with PLC integration for easy operation
• One panel controls all parameters, including vacuum, current, target position, and substrate heating temperature
• One needle valve installed on the front panel to control Ar gas inlet flow

Shield

• One shield is included for extra protection

Target

• Three Targets are included in standard package for immediate use:
• Au,  47 mm Dia.x0.12mm Thick
• Ag   47 mm Dia.x0.5mm Thick
• Cu   47 mm Dia.x2.5mm Thick
• Optional targets are available upon request.
• Note:    Al, Mg, Zn light metal, which is sensitive to air,  can not be coated using the coater.

Vacuum Pump
(Optional)

• Quality two stage vacuum pump with KF25 connector is required, but not included. 
• Built in KF25 vacuum port for connect the coater to a vacuum pump (Pic 3)

• The vacuum pump must plug in the socket located in the back of coater to achieve automatic control.
• If you don't have a suitable pump, pls click picture below to choose one:

    Dimensions
    

  440mm × 330mm × 455mm (L×W×H)

Net Weight

50 kg

Compliance

• CE certified
• MET certified available upon request at extra cost

Warranty & Certificate

• One year limited with lifetime support
• CE certified

Sputter Coating Knowledge

• For the best film strength, please use plasma cleaner to clean the sample surface before coating - Click on Lower Left Picture for more details
• For coating light metallic materials such as Al. Zinc and graphite, the sputtering coating is not efficient due to low energy, please consider using a thermal evaporating coater - Click on Lower Right Picture for more details

Application Notes

• The system requires an Ar gas tank with a pressure regulator that are not included.        
• Sputtering head connects to high voltage. The operator must wear electric insulation  gloves during operation. 
• The sputtering coater can be placed into an Ar or N2 gas glovebox for coating