Fused Silica/Quartz Wafer

Corning

Eagle XG , Fused Silica 7980 / 7978 / 7979 etc.

Feilihua

Fused Silica JGS1 / JGS2 & Single quartz etc.

O'hara

SK-1300

GM

H-K9L / Soda Lime etc.

Diameter (or Square) 

mm

76.2

100

125

150

200

300

Tol(±) 

mm

<0.1~0.25 mm

Thinnest Thickness 

mm

>0.10

>0.18

>0.30

>0.30

>0.30

>0.50

Primary Flat 

mm

22

32.5

42.5

57.5/notch

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance

UV, Optical, IR or Custom option 

Edge Rounding

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type

Single Side Polished /Double Sides Polished

Polished side Ra

nm

<1.0nm or specific per requested

Back Side Criteria

µm

General is 0.2-0.5µm or as customized

Appearance

Contamination

None

Particles >0.3µm

<=30

Saw Marks, striations

None

Scratch

None

Cracks, crowsfeel saw marks, stains

None