Ultra pure low flow single stage pressure reducing valve PRL

The PRL series ultra pure low flow single stage pressure reducing valve adopts a single stage diaphragm hard sealing design, with ultra-low leakage rate, internal EP electrolytic polishing treatment, and ultra-low internal surface roughness. High purity gas suitable for use in the semiconductor industry, with excellent repeatability, stability, and sensitivity. Each pressure reducing valve undergoes a separate pressure test, helium mass spectrometry leak test, and

Particle detection.