Ceramic Mechanical Components for Special Equipment

Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.

For the guides, adopted a soft material that does not damage the wafer.

Thinning is possible with ST.CERA's built-in vacuum channel technology that does not use adhesives.

Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.

Mounting sensors, screws and brackets is available as an option.

Designed to be used in atmosphere