Z axis micrometer positioning piezo amplified actuator for microimaging

The amplified piezo actuator is an actuator that amplifies and outputs the displacement generated by low-voltage piezo stacks preloaded by a mechanical amplifying structure.

The amplified structure is an mechanical shell, and its material is generally steel. In addition to providing optimized pre-tightening force for piezo stacks, it also protects piezo stacks from tensile forces that can cause irreversible or even fatal damage to piezo stacks. The mechanical amplified structure also provides the user with mechanical interface, easy to integrate.

Application

Probe scanning, optical mirrors positioning, optical switch, shutter, wafer testing, astronomy, focus positioning, laser cavity tuning, fiber coupling and deformation, FBG deformation, chopper, interferometer, piston machining, damping, dynamic control, valves, inkjet technology, droplet generators, etc.

Type A Technical Data

Type: 500R10

Active axes:X

Stroke [μm]±20%:500

Blocking force [N]:22.5

Stiffness [N/μm]±20%:0.045

El. capacitance [μF]±20%:43

Unloaded resonant frequency[Hz]±20%:390

Material: steel

Sensor: optional

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